QuantumClean provides the Semiconductor Industry with an outsourced tool parts cleaning service which has been engineered to produce consistently and quantifiably cleaner parts that result in improved wafer processing performance. The Semiconductor industry is capital intensive and mandates continued cost reduction and quality improvement to remain competitive. QuantumClean's outsourced parts cleaning services helps the industry achieve these mandates through in depth Cost of Ownership analysis and custom engineered cleaning solutions. Using surface Analytical Techniques, we provide our customer with critical ionic and particulate cleanliness contamination data that is used to "correlate" part cleanliness with on-tool performance for sub-0.18m fabrication processes.